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UTK's WEBT-100 series is a series of Wafer Edge Polishing Machines designed for 3" and 4" oxide and crystal wafers such as LT, LN, Quartz, Sapphire, etc. Up to 135 wafers (= 1 batch) can be placed on the rotating clamping jig. By means of 2 nylon brushes (0.2mm wire diameter) rotating up to 1,500 rpm and describing horizontal and oscillating motions the wafer edge is polished using polishing slurry.
For more information on UTK's model WEBT-100 Wafer Edge Polishing Machine please contact us.
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